MOD coating solution : Product : TOSHIMA Manufacturing Co.,Ltd. Materials System Division

We provide broad range of MOD solutions adjusted composition and concentration for coating process such as spin coating.

We challenge to manufacture experimental materials difficult for forming films.

Oxide semiconductors and conductive oxides

• InGaZnO₄
• ZnO
• In₂O₃
• SnO₂
• NiO
• TiO₂
• LaNiO₃
• RuO₂

Ferroelectrics

• Pb(Zr, Ti)O₃ [PZT]
• SrBi₂Ta₂O₉ [SBT]
• BiFeO₃ [BFO]
• KTaO₃

• KNbO₃
• (Ba, Sr)TiO₃ [BST]
• BaTiO₃
• LiNbO₃

Others

• (La, Sr)MnO₃ [LSM]
• (La, Sr)CoO₃ [LSC]

• (Pr, Ca)MnO₃ [PCMO]
• LiLaZrOx
• SrTiO₃

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TG-DTA chart of IGZO coating solution

TG-DTA chart of IGZO coating solution

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SEM image of IGZO spincoated film

SEM image of IGZO spincoated film

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