Toshima Manufacturing Co., Ltd. Materials System Division
TOSHIMA Manufacturing Co.,Ltd. Materials System Division
Toshima Manufacturing Co., Ltd. Materials System Division
Toshima Manufacturing Co., Ltd. Materials System Division

Crystallization of Ga2O3 thin films on MgAl2O4 substrate by excimer laser irradiation

T.Matsushima1, H.Morita1, N.Tsuchimine2, S.Kaneko3,1, A.Matsuda1, M.Yoshimoto1

1.Tokyo Inst. of Tech., 2.Toshima Manufacturing Co., Ltd., 3.Kanagawa Industrial Technology Center

The 67th Japan Society of Applied Physics Spring Meeting, 12p-D419-10

2020 Spring

Paper and Conference Presentation