Toshima Manufacturing Co., Ltd. Materials System Division
TOSHIMA Manufacturing Co.,Ltd. Materials System Division
Toshima Manufacturing Co., Ltd. Materials System Division
Toshima Manufacturing Co., Ltd. Materials System Division

Preparation of oxide thin film on periodic nanostructured polymer substrates

K.Iwasa1, T.Oga1, N.Tsuchimine2, S.Kaneko3, 1, A.Matsuda1, M.Yoshimoto11. Tokyo Inst. of Tech., 2.Toshima Manufacturing Co., Ltd., 3. Kanagawa Industrial Technology Center

1. Tokyo Inst. of Tech., 2.Toshima Manufacturing Co., Ltd., 3. Kanagawa Industrial Technology Center

The 79th Japan Society of Applied Physics Autumn Meeting, 19p-234A-9

2018 Autumn

Paper and Conference Presentation