Toshima Manufacturing Co., Ltd. Materials System Division
TOSHIMA Manufacturing Co.,Ltd. Materials System Division
Toshima Manufacturing Co., Ltd. Materials System Division
Toshima Manufacturing Co., Ltd. Materials System Division

Piezoelectric Ferroelectric materials

Piezoelectric / ferroelectric films typically characterized by piezoelectric effect are applied to various devices such as automotive censors and inkjet heads. We provide high density and high quality sputtering targets, MOD coating solutions and MOCVD precursors in order to achieve ferroelectrics' full potential. Also, we provide multiferroic and lead-free ferroelectric materials. Our dia 300mm PZT targets are already used in mass production.

Ferroelectric layer

Pb(Zr,Ti)O3(PZT)
(Pb,La)(Zr,Ti)O3(PLZT)
Pb(Zr,Ti,Nb)O3(PZTN)
SrBi2Ta2O9(SBT)
(K,Na)NbO3(KNN)
KNbO3
KTaO3
(Na,Bi)TiO3(NBT)
BiFeO3(BFO)

Gate insulator layer

HfO2
HfSiO(N)
HfO2-Al2O3
La2O3
La2O3-Al2O3

Electrode layer

Pt
Ir
IrO2
SrRuO3(SRO)
LaNiO3
TiN


Feel free to contact us if you have any other inquiries besides above.

P-E Hysteresis loops
Butterfly curve
Pb(Zr,Ti,Nb)O3 Target
BiFeO3 Target
SrBi2Ta2O9 Target