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Sputtering system that is suitable for functional ceramics film
TM-3 sputtering system is capable of variety of sputtering condition such as substrate heating and lamination. This system can sputter functional ceramics such as TCO, TAOS, and thin film Li battery materials.
Example: ITO, TNO, IGZO, LLZ, LCO, LiFePO4, etc
Sputtering system with high productivity
L560 sputtering system is good for cost performance. It is applicable for single layer and metal layer as well as decorative film and protective film.
Example: Single element metal, TiN, SiO2, Si3N4, ZnO, etc